JPH019151Y2 - - Google Patents
Info
- Publication number
- JPH019151Y2 JPH019151Y2 JP13783483U JP13783483U JPH019151Y2 JP H019151 Y2 JPH019151 Y2 JP H019151Y2 JP 13783483 U JP13783483 U JP 13783483U JP 13783483 U JP13783483 U JP 13783483U JP H019151 Y2 JPH019151 Y2 JP H019151Y2
- Authority
- JP
- Japan
- Prior art keywords
- shroud
- refrigerant
- semiconductor manufacturing
- liquid level
- drop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003507 refrigerant Substances 0.000 claims description 36
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13783483U JPS6045427U (ja) | 1983-09-07 | 1983-09-07 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13783483U JPS6045427U (ja) | 1983-09-07 | 1983-09-07 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6045427U JPS6045427U (ja) | 1985-03-30 |
| JPH019151Y2 true JPH019151Y2 (en]) | 1989-03-13 |
Family
ID=30309463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13783483U Granted JPS6045427U (ja) | 1983-09-07 | 1983-09-07 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045427U (en]) |
-
1983
- 1983-09-07 JP JP13783483U patent/JPS6045427U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6045427U (ja) | 1985-03-30 |
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